8

Effect of Al2O3 particle size on vacuum breakdown behavior of Al2O3/Cu composite

Year:
2009
Language:
english
File:
PDF, 907 KB
english, 2009
9

Diffusion barrier performance of amorphous W–Ti–N films in Cu metallization

Year:
2010
Language:
english
File:
PDF, 888 KB
english, 2010